99.999% 5N Carbon Tetrafluoride CF4, the semiconductor electronic special gas industry has high technical barriers. The production process of semiconductor electronic special gases involves many process technologies such as synthesis, purification, mixed gas preparation, filling, analysis and testing, and gas cylinder handling. Each step has strict technical parameter requirements and quality control measures. In order to ensure the quality and yield of semiconductor devices, special gas products must meet the requirements of "ultra-pure" and "ultra-clean" at the same time. "Ultra-pure" requires the gas purity to reach 4.5N, 5N or even 6N, 7N (N is the abbreviation of Nine, and there are several Ns and several 9s. "Ultra-clean" requires strict control of the content of particles and metal impurities. As a parameter of special gases, every increase in purity by one N and every decrease in the concentration of particles and metal impurities by one order of magnitude will lead to an increase in process complexity and difficulty.